Process Hierarchy

If you are interested in this process, either by itself or as part of a longer processing sequence, please send us email at engineering@mems-exchange.org or call us at (703) 262-5368
  Photoresist strip (non-metal)
Batch size 25
Etchant
Solutions and their concentrations.
 sulfuric acid/hydrogen peroxide
Material photoresist (category)
Process duration 40 min
Selectivity
Primary material removal rate divided by removal rates of secondary materials (i.e., factors by which primary material is removed faster than secondary materials)
 photoresist (category): 1
Sides processed both
Temperature 120 °C
Wafer size
Wafer size
Equipment Nonmetal wet bench
Equipment characteristics:
Wafer holder
Device that holds the wafers during processing.
 teflon chuck
Wafer materials
List of wafer materials this tool can accept (not list of all materials, just the wafer itself).
 silicon, glass (category), quartz (single crystal), sapphire, silicon on insulator, silicon on sapphire
Wafer thickness
List or range of wafer thicknesses the tool can accept
 300 .. 550 µm
Comments:
  • Doesn't etch silicon, silicon dioxide, silicon nitride, or silicon on insulator.