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About MEMS
Geometric metrology: Page 2 of 4
Process Hierarchy
Bonding
Clean
Consulting
Deposition
Doping
Etch
LIGA
Lift off
Lithography
Mask making
Metrology
Electrical metrology
Geometric metrology
Miscellaneous metrology
Miscellaneous
Packaging
Polishing
Process technologies
Thermal
Unique capabilities
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Process
Spectrophotometric film thickness measurement
Stylus profilometer 1-D step measurement
AFM (Atomic force microscopy)
Optical Microscopy
Optical surface profilometry
SEM sample analysis
Stylus profilometer step measurement
Wafer curvature measurement
Wafer curvature measurement (stress calculation)
Wafer curvature measurement (thermal expansion & biaxial modulus calculation)
SEM sample analysis
Spectrophotometric film thickness measurement
Microscope inspection
Spectrophotometric film thickness measurement #1
Spectrophotometric film thickness measurement #2
Spectroscopic ellipsometry film thickness measurement
Stylus profilometer step measurement
Wafer curvature measurement
Wafer curvature measurement with stress calculation
Spectrophotometric film thickness
Results Page:
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